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국제학술대회

PUBLICATIONS > Presentation > 국제학술대회 목록
게재일 발표자 / 제목 / 학회명
2002. 10. 23.
발표자
Oh Joong Kwon, Moo Seong Kang, Jae Jeong Kim
제목
Ruthenium Bottom Electrode Prapared by Electroplating for High k DRAM Capacitor
학회명
202nd Meeting of ECS
2002. 10. 21
발표자
Chang Hwa Lee, Jae Jeong Kim
제목
Self-annealing effect of electrolessly deposited copper thin films based on Co(II)-ethylenediamine as a reducing agent
학회명
202nd Meeting of ECS
2002. 09. 29
발표자
Soo-Kil Kim, Chang Hwa Lee, Yong Shik Kim, Jae Jeong Kim
제목
Investigation of Electrolessly Plated Copper Seed Layers for Copper Electrodeposition Applicable to ULSI Interconnection
학회명
9th APPChE Congress and CHEMECA 2002
2001. 11. 27
발표자
Joon-Mo Seo, Soo-Kil Kim, Jae Jeong Kim
제목
Electroplated Ag Thin Film for ULSI Interconnection Material
학회명
MRS 2001 Fall Meeting
2001. 09. 25
발표자
Yong Shik Kim, Soo-Kil Kim, Jea Jeong Kim
제목
Co-suppression behavior of polyethylene glycol and chloride ion at copper electrodeposition
학회명
2001 18th VMIC(IMIC)
2001. 09. 25
발표자
Han-Hum Park, Seung-Hwan Cha, Chang-Deok Lee, Jae Jeong Kim
제목
The optimum content of Mg in electroless silver plating for microelectronic interconnection
학회명
2001 18th VMIC(IMIC)
2001. 05. 28
발표자
Doo Hwan Jung, Moon Soo Kim, Sang Hyun Kim, Do Young Yoon, Jae Jeong Kim
제목
Surface Roughness Reducing Effect of Iodine Sources (CH3I, C2H5,I) on Ru and RuO2 composite Film Grown by MOCVD
학회명
2001 The Second Asian Conference on Chemical Vapor Deposition
2001. 03. 05
발표자
Seung Hwan Cha, Chang Duk Lee, Jae Jeong Kim
제목
Investigation of EDTA Mechanism in Copper Electroless Plating
학회명
2001 7th DCMIC(IMIC)
2001. 03. 05
발표자
Soo-Kil Kim, Jong-Uk Bae, Jae Jeong Kim
제목
Investigation of Copper Electrodeposition in the Presence of Benzotriazole as a Brightener
학회명
2001 7th DCMIC(IMIC)
2000. 10. 01
발표자
정두환, 윤도영, 김재정?
제목
Ru-MOCVD 공정의 CFD해석 및 Iodine 의 효과 (CFD Analysis of Ru-MOCVD Process: Effect of Iodine)?
학회명
한국화학공학회 2000 가을 학술대회?
2000. 08. 04
발표자
정두환, 김문수, 윤도영, 김재정?
제목
Ru MOCVD에서의 요오드 효과?
학회명
제3회 CVD 심포지움?
2000. 04. 21
발표자
김재정?
제목
초고집적 반도체 세대의 공정 기술 (Semiconductor Processes In ULSI era)?
학회명
한국화학공학회 2000 봄 학술대회?
2000
발표자
Jae Jeong Kim
제목
Front End Process Technology in Chip Process
학회명
ASEAN-ROK Workshop on MICROELECTRONICS TECHNOLOGY
2000
발표자
Jun Yong Kim, Chae Ho Jeong, Nae Hak Park, Sang Bum Han, Jin Won Park, Jae Jeong Kim
제목
Investigation of Aluminum CMP to Apply to Sub-Quarter Micron DRAM Devices
학회명
2000 17thVMIC(IMIC)
1996. 10. 01
발표자
정상철, 박지수, 윤여분, 노재성, 김재정?
제목
Ti-Silicide 형성에 미치는 전세정 효과 (The Effect of Precleaning Treatments on The Formation of Ti-Silicide)?
학회명
한국화학공학회 가을 학술대회?

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