| 2002. 04 |
| 저자 |
Jae Jeong Kim, Doo Hwan Jung, Moon Soo Kim, Sang Hyun Kim, Do Young Yoon
|
| 논문명 |
Surface Roughness Reducing Effect of Iodine Sources (CH3I, C2H5I) on Ru and RuO2 Composite Films Grown by MOCVD
|
| 저널명 |
Thin Solid Films
|
|
409 |
|
28-32 |
| 2002. 02. |
| 저자 |
Jae Jeong Kim, Jun Yong Kim, Chae Ho Jeong, Nae Hak Park, Sang Bum Han, Jin Won Park, Won-Jun Lee
|
| 논문명 |
Corrosion in Aluminum Chemical Mechanical Planarization for Sub-Quarter Micron Dynamic Random Access Memory Devices
|
| 저널명 |
Japanese Journal of Applied Physics
|
|
41 |
2A (part 1) |
925-929 |
| 2001. 12. |
| 저자 |
Jae Jeong Kim, Seung Hwan Cha
|
| 논문명 |
Optimized Surface Pre-treatments for Cu Electroless Plating in ULSI Device Interconnection
|
| 저널명 |
Japanese Journal of Applied Physics
|
|
40 |
12 |
7151-7155 |
| 2001. 12. |
| 저자 |
Jae Jeong Kim, Soo-Kil Kim
|
| 논문명 |
Optimized Surface Pretreatments for Copper Electroplating
|
| 저널명 |
Applied Surface Science
|
|
183 |
|
311-318 |
| 2001. 11. 15 |
| 저자 |
Jong-Uk Bae, Dong Kyun Sohn, Ji-Soo Park, Chang Hee Han, Jin Won Park, Yeong-Cheol Kim, Jae Jeong Kim
|
| 논문명 |
A Study on Thermal Stability of CoSi2 Employing Novel Fine-Grained Polycrystalline Silicon/CoSi2/Si(001) System
|
| 저널명 |
Japanese Journal of Applied Physics
|
|
40 |
11 |
6307-6310 |
| 1999. 06. |
| 저자 |
Jeong Soo Byun, Byung Hak Lee, Ji-Soo Park, Dong Kyun Sohn, J. Hong, W-J. Cho, Sang Jun Choi, and Jae Jeong Kim
|
| 논문명 |
Reduction of Dichlorosilane-Based Tungsten Silicide Resistivity by Amorphization and Its Applicability as an Electrode
|
| 저널명 |
Journal of the Electrochemical Society
|
|
146 |
6 |
2261-2269 |
| 1999. 02. |
| 저자 |
Jae-Hyun Joo, Jong-Bum Park, Younsoo Kim, Kong-Soo Lee, Jun-Sik Lee, Jae-Sung Roh and Jae-Jeong Kim
|
| 논문명 |
Low Temperature Chemical Vapor Deposition of (Ba, Sr)TiO3 Thin Films for High Density Dynamic Random Access Memory Capacitors
|
| 저널명 |
Japanese Journal of Applied Physics
|
|
38 |
2B |
L195-L198 |
