Electroless deposition
▣ Theory of electroless deposition
▶ Electrochemical reduction process of metal ions by the oxidation of reducing agent (autocatalytic process)
▣ Cu electroless deposition
▶ Cu seed layer for electrodeposition
▶ Electroless bottom-up filling for main conductor in integrated circuits
▣ Ag electroless deposition
▶ Electrolyte stability control and thin film properties
▣ Co electroless deposition
▶ Improvement of the oxidation resistance of Cu film by Co-alloy capping process
